5/10/2021 0 Comments Kla Tencor Profilometer Manual
Its main objective is to give an overview of all the techniques developed and how they work, as well as all the possibilities they bring.The measured profiles allow the analysis of shape, surface states (roughness, undulation, texturing), to survey in XYZ (3D surface relief), to quantify steps and channels, to characterize a surface constraint (2D stress 3D).Accurate and repeatable at a few Z Angstroms and can accommodate large samples up to 500x500mm.
![]() The P-7 is a metrology tool particularly appreciated in Quality Control for Research and Industry. The D600 profilometer enables 2D and 3D profile measurement and analysis. Kla Tencor Profilometer Manual 360 RotationIt is equipped with a 200mm stage with XY movement motorization, with manual 360 rotation and a central suction. As standard, it already has a double optical detector allowing a vertical measurement range of 0-1200m with sub-nanometric precision and a low adjustable pressing force (0.03 to 15 mg). More information. The D500 profilometer enables 2D profile measurement and analysis. ![]() Very appreciated for the deposit etching or structure measurement. Kla Tencor Profilometer Series Achieves VerticalUsing KLA Tencors measuring heads, the performance of FP series achieves vertical sub-nanometric precision. Tohos know-how is mainly based on adapting to long sweep strokes and repositioning with high reproducibility.
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